Evap Spares

We hold in stock thousands of spare parts for machinery used in
the semiconductor, optical and opthalmic manufacturing industries.
Spares from: 
E.T.A.,  EAO,  EAO Olten,  Eaton,  Eaton Semiconductor Equipment, 

   
E.T.A.
96152D01 Electrode, Thermocouple Photo of 96152D01
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EAO
31-122-025 Switch, Rectangular Momentary Photo of 31122025
51-165.0 Indicator, Momentary Rectangle Pushbutton Actuator without Contcat Block.Lamp, Max. 60V, 1.2W Photo of 511650
51.971.022 Switch Contact Block Photo of 51971022
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EAO OLTEN
11-433-836 Switch, Overload Photo of 11433836
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EATON
0100-00219 Tee Male 1/4" Hose Photo of 010000219
0100-00431 Link, Carriage chain KASP4K Photo of 010000431
0100-00450 Fitting, 1/8" Elbow NYL KAS Photo of 010000450
0100-00453 Fitting, Cliplock Male 1/4" Photo of 010000453
0101-00126 Cylinder, air, KASP III 0001, 150psi max. Photo of 010100126
0101-00128 Cylinder, air Scrub KASP4K Photo of 010100128
0101-00129 Cylinder, Scrub Brush KASP4 Ring for information.
0101-00186 Valve, Cliplock FEM 1/4" Photo of 010100186
0101-00192 Solenoid, 2way 0066 KASP I Photo of 010100192
0101-00199 Valve, Cliplock Female 3/8" Photo of 010100199
0101-00202-04 Valve, Flow control, Resist, Suck Back Photo of 01010020204
0101-00249 Piston, + DEV KASP4K Photo of 010100249
0101-00280-03 Gauge, Pressure, 0-15psi, 0006 15G Photo of 01010028003
031562 Lamp, Igniter, Ignitor, type GTL3 Photo of 031562
0380-00181 Coupling, + VE DEV Photo of 038000181
0491-00040 Solenoid, Unload latch, KASP Photo of 049100040
0519-00041 Screw, KASPIII Scrubber BRU, countersunk, socket head Photo of 051900041
0590-00023 Ring, KASP 4K Spindle RET 0 Photo of 059000023
0590-0014 Tru-Arc KASP Photo of 05900014
0897-0034-0001 3pc Arc Chamber, Ion Implanter Spares Photo of 089700340001
10-32X1/4 Screw, 10-32x1/4 Photo of 1032X14
1089350 GSD HE RF Resonator (Refurbished by Axcelis) Photo of 1089350
1102030 Gas Feed Through Source Photo of 1102030
1103250 Shaft Drive Photo of 1103250
1103251 Shaft Drive Photo of 1103251
1104870 Power Supply, 5V 100A Photo of 1104870
1112060 Clutch Elevator Photo of 1112060
1134780 Switch, flow, Assy Part# 60134 Serial# 1150180 From Proteus Photo of 1134780
1136070 Feedthrough, High Current M954640 Photo of 1136070
1138440 Accelerometer Assy Photo of 1138440
1138640 Suppression Plate Photo of 1138640
1139500 Lever Arm Assay 125M Photo of 1139500
114473 PCB, Extender card Photo of 114473
1150190 Flow Indicator Magne. / Proteus Industries Inc 74645 Photo of 1150190
1150761 Rep. Kit FTI remplace Photo of 1150761
1152940 Lever Assy Wafer Photo of 1152940
1201310 Thermocouple Photo of 1201310
1203800 Modified screw Photo of 1203800
1204520 Motor, Shaft mod.12V 4PH .65A 1.8DEG / Eastern Air Device Linear Actuator LA23GCKC-3 Photo of 1204520
1401000 PCB, Power Control Board - Vaporizer Component Side Just In: Photo on request.
1403750 PCB Assy Electrode Suppression PA 10C Photo of 1403750
1404590 HEX serial insulator Photo of 1404590
1407620 Data entry interface board Photo of 1407620
1430-00113 Belt, toothed, 0.08"pitch, 14" long, 1/4" wide. IC0 Tooth KASP4K Photo of 143000113
1430-00140 Sprocket, Bead 0061 KASP4K Photo of 143000140
1430-00162 Pulley, Scrubb Brush 103 Just In: Photo on request.
1460-00111 Spring, Unload latch Photo of 146000111
1500-00083 Belt, toothed, 0.08"pitch, 11.5" long, 1/4" wide. MTR KASP4K Photo of 150000083
1500182 PCB, I/Q port MA Photo of 1500182
1500290 Vaporizer Temperature PCB Photo of 1500290
1500570 PCB, Assembly Photo of 1500570
1500980 PCB, assy, flat sensor Photo of 1500980
1500990 Vaporizer Control Photo of 1500990
1501090 PCB, Beam lock Photo of 1501090
1501160 PCB, Memory Board Photo of 1501160
1501521 PCB, CPU Card 990/100 for TM990 system Photo of 1501521
1501820 REV A PCB, Datalock Slave Board, Rev A Photo of 1501820REVA
1503000 PCB, TM990 I/O Board TM 990 Photo of 1503000
1503060 PCB, Remote Controller Photo of 1503060
1503230 PCB, Analog, for TM990 system Photo of 1503230
1503750 PCB Assy Electrode Suppression PA 10C Photo of 1503750
1503950 PCB, assy backpln Photo of 1503950
1504130 Interconnect System Photo of 1504130
1504350 PCB, Assembly RMT Cont BF Photo of 1504350
1504580 PCB, Assembly Power, Rev A Photo of 1504580
1504820 PCB, Assembly Input Trans Photo of 1504820
1504931 PCB, CPU Matrox Photo of 1504931
1505050 PCB, assy datalk interference Photo of 1505050
1505110 PCB, Assy CPU VAC (TM990 101MA) Photo of 1505110
1505820 PCB, Dose Cont CPU Photo of 1505820
1507080 Datalock I/O board Photo of 1507080
1507240 PCB, transient assy Photo of 1507240
1507400 PCB, Opto isolator Board Photo of 1507400
1507560 PCB, Assy Remote Control Interface Photo of 1507560
1507630 PCB, assy data entry Photo of 1507630
1507720 PCB, Assy Resn cont 5 Photo of 1507720
1507722 PCB, Assy Reson. Cont. Photo of 1507722
1507730 PCB, Assy Com. Oscill. Photo of 1507730
1507742 PCB Photo of 1507742
1507743 PCB, Assy RMT A/D-IO Photo of 1507743
1516820 PCB Photo of 1516820
1516900 PCB, TM990 CPU 101MB, Cermaic 9900, NV ram. Photo of 1516900
1516940 PCB, Lead Screw Interface Board Photo of 1516940
1555-00007 Nozzle, Fluid 00007 Just In: Photo on request.
1555-00008 Nozzle, Air 00008 Photo of 155500008
1555-00025 Ring, Knurl KASP III 00009, 3/4" thread, 0.635 ID hole. Photo of 155500025
1612120 Cable, RF 5.2MHz Photo of 1612120
1621411 Cable, Filament Photo of 1621411
1700240 Feedthrough, Filament Photo of 1700240
17010200 STDF CLP CPLR Ceramics Photo of 17010200
17010210 STDF CPLR Ceramic Photo of 17010210
17011780 Insulator Photo of 17011780
17012100 Insulating Washer Photo of 17012100
17018100 Stop rear Photo of 17018100
17018110 Out Board Wafer Photo of 17018110
17018120 Stud Rear Stop Photo of 17018120
17020550 Plate, Aperture R Photo of 17020550
17020551 Plate, Aperture Photo of 17020551
17041480 Tube, Extension Photo of 17041480
17041490 Beam dump Photo of 17041490
17041500 Aperture Resolving Photo of 17041500
17041520 Aperture Graphite Photo of 17041520
17041800 Drip Pan Price Cool Pump 80 Kit Just In: Photo on request.
1704990 Side Plate, Ion Implanter Spares Photo of 1704990
1705001 Plate, Arc Chamber Re Photo of 1705001
17053090 Tend Stop High Cur. Photo of 17053090
17059990 Clevis Photo of 17059990
1717482 Face Plate, Ion Implanter Spares Just In: Photo on request.
1733710 Bearing, Pad Photo of 1733710
1755630 Graphite Ground Disc Photo of 1755630
1760780 Rod, MTG Pole Shoe Photo of 1760780
1761840 Aperture Graphite MA Photo of 1761840
1761850 Aperture Graphite BE Photo of 1761850
1762520 Shield Beam Photo of 1762520
1766040 Guide, R Photo of 1766040
1766080 Magnetic Shoe 1.25 Gap MA Photo of 1766080
1766570 STDF BM PLT Photo of 1766570
1766640 Clevis Photo of 1766640
1767370 Bearing, Shaft Photo of 1767370
1770530 Slit Plate Arc Chamber Photo of 1770530
1770540 Plated end Shield Photo of 1770540
1770550 End Plate Arc Chamber Photo of 1770550
1771080 Electrode, Ground Photo of 1771080
1772010 Ground Electrode Photo of 1772010
1774070 RLR Slide Photo of 1774070
17766580 Plate, beam Photo of 17766580
1781650 Clamp, Locator Shaft Photo of 1781650
1784780 Feedtrough connector Photo of 1784780
1784790 Strap Exp Photo of 1784790
1784820 Insulator Block Photo of 1784820
1784880A HSG Electron SHWR Photo of 1784880A
1785810 Screen Wafer Clamp Photo of 1785810
1787740 Trapelectron Shower Photo of 1787740
1788020 Feedtrough Flange Photo of 1788020
1788030 Feedthrough Photo of 1788030
1789810 End Plate, Ion Implanter Spares Photo of 1789810
1792520 Roller, Faraday Showe Photo of 1792520
1792551 Faraday Cup Graphite Photo of 1792551
1796490 Mounting Insulator Photo of 1796490
1796790 DR Nut NV-1 Photo of 1796790
1796791 DR Nut NV-1 Photo of 1796791
1796800 Electrode, Truncated Photo of 1796800
1796840 Extration Electrode Photo of 1796840
1798510 Block, Suppression Photo of 1798510
1820-00238 IC, P1262 (N8T97D), PROM, programmed code: 1820-00238 Photo of 182000238
1820-00273 IC, DAC D8CZ Ring for information.
1900040 Switch, Cylinder Photo of 1900040
1900070 PCB, A to D (analog to digital) Photo of 1900070
1900870 Coupling, AE Spietr DSK-2.50x3.50-01 Photo of 1900870
1902-290C RF Power Supply, 1KW, 5.2MHz. Photo of 1902290C
1902242 RF Cont Band M Plug Photo of 1902242
1902251 RF Band F SKT Photo of 1902251
1903040 PCB, TM990/101MB CPU board Photo of 1903040
1905160 Sliding Seal Set Photo of 1905160
1990-00019 Sensor, TIL78 IR receiver Photo of 199000019
1990-00020 Sensor, MRD 360 Photo of 199000020
1990-00023 Sensor, 0PB804 INDEX 0026 Photo of 199000023
1990-00027 Sensor, brake SEARCH T1L81 Photo of 199000027
2000088 Feedthrough 80KeV Photo of 2000088
2000216 PCB, driver Photo of 2000216
2000520 Variac Brush KSI From Superior Electric Photo of 2000520
2001-0115 Rod, End Oven 0115 Photo of 20010115
2100041 Power Products PM861 Photo of 2100041
2100071 Converter, DC/DC Photo of 2100071
2140-00066 Lamp, Sensor SCE0014 Photo of 214000066
2140-00075 Lamp, Overload Sensor Photo of 214000075
2500151 Ball Slide for Wafer Photo of 2500151
3101-00101 Switch, Vacuum, 00045 KASP I Range 30" to 0 hg VAC/-100 to 0 kpa, Type J40, Model 218 Photo of 310100101
3101-00134 Switch, Momentary, AR0092 KASP Photo of 310100134
3101-00135 Switch, Auto/Manual, with lamp holder, 0093 KASP I Photo of 310100135
3101-00144 Switch, IDX start/stop, with lamp holder, KASP III Photo of 310100144
3101-00146 Switch, 1c/o, Latch, with lamp holder, KASP4K Photo of 310100146
3101-00200 Switch, Keyboard, Enter, KASP Photo of 310100200
3101-00216 Switch, on/off, 6A, push/push, red button, with lamp holder, KASP4K Photo of 310100216
3130-00085 Cap, Switch, White KASP4K Photo of 313000085
3130-00086 Cap Switch, Red KASP4K Photo of 313000086
3130-00105 Button, for push-button switch, white (IDX Reset KASP III) Photo of 313000105
3150-00016 Gasket, KASP4K Vac Bowl Photo of 315000016
316-563 Switch, Index toggle, KASP I Photo of 316563
3200019 Solenoid, 3W Humphrey 31E1 120 Photo of 3200019
3500255 Seal, oil 21/8" Bore Photo of 3500255
3500256 Seal, Oil 1.850 Bore Photo of 3500256
3500257 Seal, ARI0400 -321VC Photo of 3500257
3500487 Special Seal Photo of 3500487
36F6689 Photo of 36F6689
400-31973-01 Ring + DEV Catchcup KASP4K Photo of 4003197301
400-31974-01 Ring + DEV Teflon KASP4K Photo of 4003197401
400-31975-01 Screw, + DEV Catchcup KASP4 Photo of 4003197501
400-31976-02 Catchcup DEV + KASP4K Photo of 4003197602
400-32411-04K Machining Elev. Spindle Photo of 4003241104K
400-32718-01B Conveyor motor plate Photo of 4003271801B
400-33344-01 Insert, Disp Nozz Scrubb KA Just In: Photo on request.
400-33999-01 Pulley, convey (501-30375) Photo of 4003399901
400-34879-01 Controller, Programmable, Series 945, PID Photo of 4003487901
400-34962-01 Shaft, Spindle 13524 Photo of 4003496201
400-35012-01 Bumper strip CARR 2679 KASP4 Photo of 4003501201
400-35470-01 Seal, Shaft, KASP4K Spindle, 1/4" x 5/8" x 0.2". Photo of 4003547001
4001-6888 Seal, Nylon, Kaper III, 15.25mm OD, 7.75mm ID, 1.15mm thick Photo of 40016888
401-06211 Hook, Scrub Brush KASP4K Just In: Photo on request.
401-06477 Index lead Screw KASP4K Photo of 40106477
401-06821 Housing, spindle KASP4K Photo of 40106821
401-06869 Nut, LD SCRE INDX KASP4K Photo of 40106869
401-06890 Adaptor shaft KASPIII Photo of 40106890
401-06919 Spring, centre device III Photo of 40106919
403-06967 Coupler, photo KASP4K Photo of 40306967
403-30154 Diaphragm, Scrub KASP4K Just In: Photo on request.
410-06378 Catchcup, 4" KASPIII Photo of 41006378
4100004 Pulley, Timing Photo of 4100004
4100082 Belt, Timing Photo of 4100082
4200126 Bushing, Ball Res MT / Thomson RSL 500 Photo of 4200126
4300498 Pin, DWL 0626X.50L Photo of 4300498
430497 Pin, SPL CP645 Photo of 430497
4400001 Screw, 10-32x3/8 SHCS SS Photo of 4400001
4400053 Screw, 10-32x1/2 FL/S Photo of 4400053
4400120 Screw, 2-56x1/4 S/H/C Photo of 4400120
4600129 Washer, Bellul Photo of 4600129
4618809EO1 Manifold + VE DEV KASP4K Photo of 4618809EO1
5000110 Base, Relay Photo of 5000110
5000114 Contact Photo of 5000114
5000593 Motor Starter 3HP Photo of 5000593
5000594 Motor Starter Photo of 5000594
5000933 Relay, Time delay, Diversified Electronics TDD-0150 Photo of 5000933
5001-7485 Sensor block 7485 Photo of 50017485
5001-7751 Element, Upper ICO 7751 Photo of 50017751
501-07029 Latch, unload assembly KASPIII Photo of 50107029
501-07206 Head scrub, Disp+Piping KAS Photo of 50107206
501-31318 Box + DEV Valve ASS KASP4K Photo of 50131318
501-34372-01 Nozzle, Resist 1709 Photo of 5013437201
501-50010 PCB, Power supply, 50010 KAS Photo of 50150010
501-50021-01 PCB, Memory 50021 KASP4K Photo of 5015002101
501-50033 PCB, CON/ICO Sensor 50033 Photo of 50150033
501-50051 PCB, CCU 50000 KASP4K Photo of 50150051
506-31781-01 Cable, Spin MTR Harness KA Photo of 5063178101
5100304 Plug, 3way, 15A 125V 4720-C NY Hubbell Photo of 5100304
5100448 Quick Connect F 30 Photo of 5100448
527-32569-01 PCB, Resist pump 7124 KASP4 Photo of 5273256901
60-300 Power Supply for Shunt Motor Fenner SD1-1525-101-1 Photo of 60300
6000327 Accelerometer /Setra 141A-2G N537243 Photo of 6000327
6300082 Transistor, IRF 453, N channel Mosfet, 450V 11A Photo of 6300082
6500114 Mercury wetted contact relay from Midland Ross 162-151 AOO Photo of 6500114
6500218 Switch, pressure, AT4 Photo of 6500218
6500258 Switch, optical Photo of 6500258
6500381 Switch, OPT CLI-8905 Photo of 6500381
6500406 Switch Photo of 6500406
67F8523 Photo of 67F8523
78SM-3 Clip, ICO Tach/Encode MTG KA Just In: Photo on request.
8120-00019 Cable, Retractile, retracted length: 2ft, extended: 10ft, 4 way, IDX CL KASP4K Photo of 812000019
81805-001 Gear, Nylon, Carr Motor KASP Photo of 81805001
9100-00039 Transformer, 115/230v input, 34v, 700mA output Photo of 910000039
9100-00040 Transformer, Filament, CPU 6VAC KASP Photo of 910000040
9100-00046 Transformer, 115/230v input, 12v output KAS Photo of 910000046
E1404650 PCB Photo of E1404650
E1407080 PCB, interface board Photo of E1407080
E1407590 PCB, Power Board Photo of E1407590
E1507070 PCB, Sensor Board Photo of E1507070
E1621415 Cable, with Lugs Photo of E1621415
OPB875T55 Opto, OPB875T55 Interrupt KA Photo of OPB875T55
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EATON SEMICONDUCTOR EQUIPMENT
2200024C Series 2000 HV Unit (218363) Photo of 2200024C
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EATON
YJ03880 PCB, art# 1403880 Photo of YJ03880
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Contact details:

You can contact us at:
Allsmart House,
2 Pipit Rise
Bedford
MK41 7JS
United Kingdom
or
by phone on +44 (0)7824 665466
or fax on +44 (0)1234 271 991

This page last updated at 12.06 on Wednesday, 03 July 2013
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